Development of Non-contact Surface Roughness Measurement in Last Decades

摘要：

Surface roughness measurement is widely required in the quality assurance of manufacturing processes. And a number of surface roughness measurement methods have been developed since long ago. This paper introduces four kind typical non contact measurement methods, which have been widely investigated in the last decades for precise measurement.They are microscopes methods, interferometry methods, diffraction methods, and methods based on scattering modeling. Methods of each kind are reviewed, furthermore the advantages and disadvantages of each kind are analyzed.

关键词： surface roughness microscope interferometry diffraction scattering modeling

作者: XiaoMei Xu Hong Hu

作者单位: HIT Shenzhen Graduate School Harbin Institute of Technology,HIT Shenzhen,China

会议类型: 国际会议

会议名称: 2009 International Conference on Measuring Technology and Mechatronics Automation(ICMTMA 2009)(2009年检测技术与机械自动化国际会议)

会议地点: 长沙

会议语种:英文

页码: 210-213

在线出版日期: 2009-04-11（万方平台首次上网日期，不代表论文的发表时间）