Study on Software and Hardware Control of High-precision Measurement Platform for Optical Aspheric Surface
Taking high generality and efficiency into account, this paper presents a measurement and control means based on high-precision measurement platform including high precision linear motors, contacting and noncontacting measurement sensor of 0.1urn resolution and a new developed of measuring software. This platform aims to achieve high precision measurement for all kinds of optical aspheric workpieces for the detection accuracy of 2um/200* 200mm. In this paper, a measurement platform which consist of granite gantry framework, 3 axes linear motors, circle grating rotary encoder, grating linear scales, 4 axes motion control card, linear motion ball guide, contacting and noncontacting measurement sensor and so on, is designed and implemented. Through finite element stress analysis, it can find that the framework well fulfills the accuracy demand. After designed the hardware of measurement platform, the related control software is developed. Finally, the experiments for this purpose are done to validate the measurement platform accuracy.
optical aspheric surface high precision measurement platform software and hardware control
Ke Xiaolong Guo Yinbiao Guo Longxing
Department of mechanical and electrical engineering Xiamen University Xiamen,China
国际会议
长沙
英文
894-897
2009-04-11（万方平台首次上网日期，不代表论文的发表时间）