Design and Fabrication of a Novel PZT Films Based Piezoelectric Micromachined Ultrasonic Transducers

摘要：

A novel piezoelectric micromachined ultrasonic transducer (pMUT), has been designed, and successfully fabricated.A bridge type structure in flexure mode was adopted for the design of the pMUT element. The transducers comprise a 4-6μm thick silicon layer, a 1μm thick thermal oxide layer, and 1.1μm thick piezoelectric PZT layer. The PZT films were deposited by a sol-gel technique. The influence of different annealing processes on the films properties had been investigated. The PZT films annealed at 650 ℃ for half an hour in air exhibit preferred orientation in the direction of the (100) plane. The piezoelectric coefficient d33 of PZT films was measured as 120 pC/N. The bridge diaphragms are much more compliant and free from the clamped stress in two side edges in vibrating diaphragms in comparison with diaphragms clamped on all four edges. The sensitivity of novel pMUT is expected to be higher.

作者: Junhong Li Chenghao Wang Mengwei Liu

作者单位: Institute of Acoustics,Chinese Academy of Science

会议类型: 国际会议

会议名称: 2009 International Conference on Measuring Technology and Mechatronics Automation(ICMTMA 2009)(2009年检测技术与机械自动化国际会议)

会议地点: 长沙

会议语种:英文

页码: 989-993

在线出版日期: 2009-04-11（万方平台首次上网日期，不代表论文的发表时间）