Digital holography used for shape measurement of microscopic object

摘要：

Digital holography is an emergent imaging technique which provides complete three-dimensional information of an object. An off-axis Fresnel digital holographic system with pre-magnification is built. The recording and numerical reconstruction of digital hologram is analyzed. Experimental investigations have been performed for a USAF test target. The focal plane is determined automatically by Fourier spectrum algorithm. The accurate phase image is obtained based on the automatic phase aberration compensation procedure. The lateral resolution with better than 1 μm and the axial resolution of no larger than 10nm have been achieved experimentally. The results show that digital holography is very suited for imaging and measurement of microscopic object.

作者: Jingbo Liu Xiufa Song Min Huang Huaying Wang

作者单位: Hebei University of Engineering,Handan,056038,China

会议类型: 国际会议

会议名称: 2009 International Conference on Measuring Technology and Mechatronics Automation(ICMTMA 2009)(2009年检测技术与机械自动化国际会议)

会议地点: 长沙

会议语种:英文

页码: 1002-1005

在线出版日期: 2009-04-11（万方平台首次上网日期，不代表论文的发表时间）