Three-dimensional Surfaces of Inorganic Materials Fabricated by Femtosecond Laser Lithography

摘要：

Three-dimensional (3D) surfaces of inorganic optical materials were created by a combined process of nonlinear lithography and plasma etching. 3D patterns were directly written inside a KMPR-1050, which is chemically amplified negative-tone resists, on convex lenses by femtosecond laser-induced nonlinear optical absorption. Then, the patterns were transferred to the underlying substrates by CHF3 plasma. The fabrication of silica-based diffractive-refractive hybrid microlenses was demonstrated. We obtained micro-Fresnel lenses with smooth surfaces even on curved substrates. When 632.8-nm-wavelength laser light was coupled to the hybrid lens, the primary focal length was 614 μm. This result well agreed with theoretical value 617 μm. Our combined process was useful for the precise fabrication of 3D surfaces based on inorganic materials.

作者: H.Nishiyama M.Mizoshiri J.Nishii Y.Hirata

作者单位: Division of Materials and Manufacturing Science,Graduate School of Engineering Osaka University,Japa National Institute of Advanced Industrial Science and Technology,Japan

会议类型: 国际会议

会议名称: Progress in Electromagnetics Research Symposium 2009(2009年电磁学研究新进展学术研讨会)(PIERS 2009)

会议地点: 北京

会议语种:英文

页码: 1322-1325

在线出版日期: 2009-03-23（万方平台首次上网日期，不代表论文的发表时间）