Computational Parameters in Simulation of Microscope Images

摘要：

The simulation of microscope images computed from scattered fields determined using integral equations depends on a number of parameters that are not related to the scatterer or to the microscope but are choices made for the computation method. The effect of different choices on the images and on the estimated line width are determined for two typical configurations.

作者: Egon Marx James Potzick

作者单位: National Institute of Standards and Technology,Gaithersburg,MD 20899-8212,USA

会议类型: 国际会议

会议名称: Progress in Electromagnetics Research Symposium 2009(2009年电磁学研究新进展学术研讨会)(PIERS 2009)

会议地点: 北京

会议语种:英文

页码: 1330-1334

在线出版日期: 2009-03-23（万方平台首次上网日期，不代表论文的发表时间）