Growth and Electrical Characterization of Horizontally Aligned CNTs

摘要：

Nickel catalyst nanoparticles acting as nucleating seeds for carbon nanotube (CNT) growth were selectively deposited on the sidewalls of titanium nitride (TiN) electrodes by electrochemical deposition (ECD) from a Ni2+ electrolyte solution. Horizontal aligned CNTs were grown selectively from the sidewalls of these TiN electrodes forming a bridging CNT contact between the electrode gaps. Current-voltage measurements demonstrated this could be a promising technique towards nanoscale interconnections and nanoelectronic devices with resistance values for the bridging CNTs as low as 300.

作者: C. Santini D. J. Cott A. Romo Negreira S. Riva Sanseverino S. De Gendt P. M. Vereecken

作者单位: IMEC,Kapeldreef 75,3001 Leuven,Belgium Department of Electrical,Electronics and Telecommunication En IMEC,Kapeldreef 75,3001 Leuven,Belgium IMEC,Kapeldreef 75,3001 Leuven,Belgium Metallurgy and Materials Engineering Department,KU Leuven,Kas Department of Electrical,Electronics and Telecommunication Engineering,Universityof Palermo,Viale de IMEC,Kapeldreef 75,3001 Leuven,Belgium Chemistry Department,KU Leuven,Celestijnenlaan 200f- Leuven,B

会议类型: 国际会议

会议名称: ISTC/CSTIC2009中国国际半导体技术研讨会

会议地点: 上海

会议语种:英文

页码: 845-850

在线出版日期: 2009-03-19（万方平台首次上网日期，不代表论文的发表时间）