Distributions of Light Elements and Their Precipitations Grown by Unidirectional Solidification Method in Multicrystalline Silicon for Solar Cells

摘要：

We investigated the relationship between the formation of small grains and distribution of precipitates such as Si3N4 and SiON in a multicrystalline silicon ingot grown by the unidirectional solidification method. Si3N4 precipitate was mainly observed inside the small grain region, while SiON was mainly precipitated outside there. We found that SiON started to precipitate prior to formation of Si3N4 precipitates. Therefore, precipitation of SiON prior to precipitation of Si3N4 plays a key role in the formation of small grains.

作者: H. Matsuo S. Hisamatsu Y. Kangawa K. Kakimoto

作者单位: Graduate School of Engineering,Kyushu University,816-8580,Japan Graduate School of Engineering,Kyushu University,816-8580,JapanResearch Institute for Applied Mechan

会议类型: 国际会议

会议名称: ISTC/CSTIC2009中国国际半导体技术研讨会

会议地点: 上海

会议语种:英文

页码: 1037-1042

在线出版日期: 2009-03-19（万方平台首次上网日期，不代表论文的发表时间）