Functions and three dimensional parameters of surface tezture

摘要：

This paper presents the relationship between the functions and five types of three dimensional parameters: height, spatial, functions and related, miscellaneous and hybrid parameters of surface texture carried out by ISO TC 213. A novel calculation method of ‘zero wear volume is proposed according to the value change of the function volume parameters of Vvv, Vvc and Vmp before and after abrasion. In order to check the difference of three dimensional parameters in engineering surface texture measurement, a surface texture measurement of silicon wafer before and after polish was carried out.

关键词： surface tezture three dimensional parameter function wear

作者: Qunfen Qi Xiaojun Liu Xiangqian Jiang

作者单位: Dept. of Instrumentation, Huazhong Univ. of Sci. & Tech., Wuhan, 430074 CHINA Dept. of Instrumentation, Huazhong Univ. of Sci. & Tech., Wuhan, 430074 CHINA Centre for Precision T

会议类型: 国际会议

会议名称: 第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology

会议地点: 沈阳

会议语种:英文

页码: 1-7

在线出版日期: 2008-09-15（万方平台首次上网日期，不代表论文的发表时间）