Simulation of air gap vibration on aerostatic bearing under flow/structure coupled conditions

摘要：

The vibration of aerostatic bearing air gap is one of the main factors, which restricts the precision of nano-processing and nano-measurement. Finite volume method was employed to obtain the air gap steady flow of different air gap thicknesses for the demonstration of vibrations under flow/structure coupled conditions. The unsteady flow of air gap was analyzed numerically by using the air gap flow & boundary movement control equations to get the pressure distribution on the slide surface and the amplitude of air gap for further study on the self-excited vibration of aerostatic bearings. Numerical analyses show that the highest aerostatic bearing amplitude is relative to the difference between load capacity and gravity at the initial moment as air gap rises, and the final air gap thickness has nothing to do with the initial air gap thickness. The results presented a new analytic demonstration for the research on the reduction of aerostatic bearing vibration.

关键词： Aerostatic bearing aerostatic guide air gap vibration flow/structure coupled numerical simulation

作者: Qian Wang Jianjin Wu Dongsheng Li

作者单位: College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, 310018,P.R. Chin College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, 310018, P.R. Chi

会议类型: 国际会议

会议名称: 第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology

会议地点: 沈阳

会议语种:英文

页码: 1-8

在线出版日期: 2008-09-15（万方平台首次上网日期，不代表论文的发表时间）