Effect of probe offset on ultra-precision measurement of circular profile
In order to further improve the ultra-precision measuring accuracy of circular profile, the sources of probe offset error was analyzed and one-parameter measurement model was established that with probe offset parameter only, and it was concluded that probe offset has a significant effect on the measurement of an object with a small size or large profile deviation; the two-parameter measurement model that with probe offset error d and eccentricity error (e, a)was simultaneously analyzed, and the accurate interaction relationship between d and eis obtained. Simulation results show that probe offset error has a significant amplifying action to eccentricity error, and the measurement error increases as probe offset error increase. This paper provides the basis for further improvement of ultra-precision measuring accuracy of circular profile.
roundness ultra-precision measurement probe offset eccentricity
Huang Jingzhi Tan Jiubin
Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology,P Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology,
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-6
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）