Loop-by-loop modeling of whole-closed-loop 2D high-precision motion platform

摘要：

A 2D high-precision motion unit plays an important role in an automatic optical inspection (AOI) system, and its positioning accuracy and speed have an decisive effect on the inspection accuracy, efficiency and stability of the AOI system, but the present AOI systems cannot ensure the high speed and high-precision at the same time. To solve this problem, an automatic optical platform is developed, using the whole-closed-loop, fast, high-precision positioning technology to construct the mathematical models of its motion control unit, including models of current loop, velocity loop and position loop from inside to outside. Experiments were made on the motion platform using a laser interferometer. Experimental results show that the 2D motion platform can be used to reach a scanning speed of 20m/s and a positioning accuracy of 9μm in a work area of 300mm * 3000mm with a load of 5kg.

关键词： Automatic optical inspection (AOI) motion control whole-closed-loop mathematical model

作者: Shu-liang YE Dong-sheng LI Tian-tai GUO Lin FU Wei XU

作者单位: China Jiliang University, Hangzhou 310018, China

会议类型: 国际会议

会议名称: 第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology

会议地点: 沈阳

会议语种:英文

页码: 1-7

在线出版日期: 2008-09-15（万方平台首次上网日期，不代表论文的发表时间）