Nanometric edge profile measurement of cutting tools on a diamond turning machine
Single crystal diamond tools are used for fabrication of precision parts 1-5. Although there are many types of tools that are supplied, the tools with round nose are popular for machining very smooth surfaces. Tools with small nose radii, small wedge angles and included angles are also being utilized for fabrication of micro structured surfaces such as microlens arrays 6, diffractive optical elements and so on. In ultra precision machining, tools are very important as a part of the machining equipment. The roughness or profile of machined surface may become out of desired tolerance. It is thus necessary to know the state of the tool edge accurately. To meet these requirements, an atomic force microscope (AFM) for measuring the 3D edge profiles of tools having nanometer-scale cutting edge radii with high resolution has been developed 7-8. Although the AFM probe unit is combined with an optical sensor for aligning the measurement probe with the tools edge top to be measured in short time in this system, this time only the AFM probe unit was used. During the measurement time, that was attached onto the ultra precision turning machine to confirm the possibility of profile measurement system.
atomic force microscope (AFM) diamond cutting tool
Takemi Asai Yoshikazu Arai Yuguo Cui Wei Gao
Nano-Metrology and Control Laboratory, Department of Nanomechanics, School of Engineering,Tohoku Uni Nano-Metrology and Control Laboratory, Department of Nanomechanics, School of Engineering, Tohoku Un
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-6
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）