Sputter deposited zinc ozide photoconductive antenna for terahertz time-domain spectroscopy

摘要：

In this paper, we report on the design and fabrication of zinc oxide (ZnO) photoconductive antenna for a terahertz (THz) pulse emitter and detector, and its integration with scanning near-field optical microscopy probe. The fabricated ZnO photoconductive antennas are evaluated in a THz time-domain spectroscopy measurement system. The resistivity of ZnO deposited by rf sputter at the room temperature was 9.6×104Ωcm. The bandwidth of ZnO photoconductive antenna was up to 1 THz.

关键词： Microelectromechanical Systems (MEMS) Terahertz Scanning Near-Field Optical Microscopy Terahertz Time-domain Spectroscopy zinc ozide

作者: Kentaro Iwami Takahito Ono Masayoshi Esashi

作者单位: Division of Advanced Mechanical Systems Engineering, Tokyo University of Agriculture andTechnology, Department of Nanomechanics, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku,Sendai, Japan 980-8 Advanced Institute of Materials Research, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Senda

会议类型: 国际会议

会议名称: 第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology

会议地点: 沈阳

会议语种:英文

页码: 1-6

在线出版日期: 2008-09-15（万方平台首次上网日期，不代表论文的发表时间）