Measurement of micro-hole with high aspect ratio by double optical fibers coupling
In order to measure the geometry of a micro-hole with high aspect ratio, we made the light coming out from the laser to transmit in the reversal direction by double optical fibers coupling, modeled both the energy distribution at the end of an optical fiber and the output of CCD, used zernike moment subpixel algorithm to locate the edge of an image and a compensation algorithm to improve the precision of edge location. The effectiveness of the method newly developed is verified through experiments. Experimental results indicate that the newly developed method can be used to measure the geometry of a blind hole of 2.0mm depth with a diameter of about 0.2mm using a double frequency interferometer with a repeatability uncertainty of less than 0.4μm.
micro-hole with high aspect ratio double optical fibers coupling reversal transmission edge location
Cui Jiwen Tan Jiubin Wang Fei Song Chuanxi
Center of ultra-precision optolelectronic instrument.Harbin Institute of Technology, Harbin, 150001, Center of ultra-precision optolelectronic instrument. Harbin Institute of Technology, Harbin, 150001
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-10
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）