Precision inspection of diameters for circular reflecting cylinders
The urgent problem for industrial inspection is non-contact precision measurement the diameters of circular reflecting cylinders, namely, rolling bearing elements with diameter from 10 mm to 50 mm must be inspected with error no more than 1 μm. Diffraction method for measurement of diameters of circular reflecting cylinders is presented. Peculiarity of this method is rather measurement gaps between two cylinder vertexes and two reference half-planes, than measurement of cylinder diameter by direct Fraunhofer method. Equivalent model of formation of Fraunhofer diffraction pattern by measurable object is developed. Using this model an algorithm of diffraction pattern processing was suggested that allows determining gap between object edges and reference half-planes with error no more than 1μm.
3D optical inspection Fraunhofer diffraction 3D diffraction measurement cylinder rollers accuracy
Yuri V. Chugui Yuri A. Lemeshko
Technological Design Institute of Scientific Instrument Engineering (TDI SIE SB RAS)Siberian Branch Technological Design Institute of Scientific Instrument Engineering (TDI SIE SB RAS) Siberian Branch
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-8
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）