A fast and ultra-precision laser heterodyne interferometry signal processing method based on digital delay line loop

摘要：

To achieve higher dynamic resolution of laser heterodyne interferometry, a new signal processing method based on digital delay line technology is proposed. To implement ultra-multiple electronic subdivision, the multiple frequency of the reference signal which is generated from an analog phase-lock loop is passed through a multi-tap digital delay line. On every positive edge of the measurement signal, each tap of the delay line is captured and decoded to obtain the exact occurrence time. And according to the reference period, the system can also provide a real time output of the displacement results. Simulations and experiments show that using a laser heterodyne interferometry with its beat frequency of 1MHz, the system can provide a dynamic position resolution of 0.83nm at velocities up to 260mm/s by using a 64 multiple analog phase-lock loop and a 6-tap digital delay line, the update rate of the displacement positions is up to 100KHz.

关键词： heterodyne signal processing fast and ultra-precision digital delay line ultra-multiple electronic subdivision

作者: YAN Lei HU Peng-cheng DIAO Xiao-fei TAN Jiu-bin

作者单位: Institute of Ultra-precision Optoelctric Instrument Engineering, Harbin Institute ofTechnology, Heil Institute of Ultra-precision Optoelctric Instrument Engineering, Harbin Institute of Technology, Hei

会议类型: 国际会议

会议名称: 第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology

会议地点: 沈阳

会议语种:英文

页码: 1-7

在线出版日期: 2008-09-15（万方平台首次上网日期，不代表论文的发表时间）