Application of diffractive optical elements for inspection of complicated through holes
The inspection of geometrical parameters of through holes with different configurations is one of the urgent tasks in industry. The majority of the existing noncontact inspection methods doesnt allow measuring the holes of complicated (noncylindrical) configurations with good performances. Two simple developed methods based on diffractive optical elements (DOEs) make possible to inspect the through holes (with the diameter from 5 to 100 mm) both cylindrical and complicated configurations with acceptable lateral and axial (longitudinal) resolution. First method, based on the scanning of inner hole surface by light ring, takes a mechanical displacement of the inspected article along its axis. The second holes inspection method uses the DOE as the diffractive focuser, which generates N light rings simultaneously along the hole axis with ring spacing z. In this case no need for mechanical displacement of inspected articles, output image contains full measuring information about 3D article hole configuration. We have fabricated some binary DOEs using circular laser writing system CLWS-300, developed and produced at the TDI SIE SB RAS. The obtained results have been used under the development of universal automatic inspection system of nuclear reactors fuel assemblies spacer grids.
Diffractive optical element hole inspection
Yuri V. Chugui Yuri A. Lemeshko Peter S. Zav’yalov
Technological Design Institute of Scientific Instrument Engineering (TDI SIE SB RAS)Siberian Branch Technological Design Institute of Scientific Instrument Engineering (TDI SIE SB RAS)Siberian Branch Technological Design Institute of Scientific Instrument Engineering (TDI SIE SB RAS) Siberian Branch
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-10
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）