Thermal effects researching for laser microstructures synthesis by thermochemical circular laser writing
Features of thermal trace forming by thermochemical circular laser writing in chromium films on glass (quartz) substrates are considered on the basis of thermal equation system solution. Linear (thermal parameters do not dependence on temperature) and nonlinear (thermal parameters dependence on temperature) models are considered. It is showed that linear model is enough for thermal trace broads consideration. Calculation of thermal field is provided for wide range of linear scanning velocities (from 1.2 up to 9.4 m/sec). Dynamics of chromium film heating when laser beam is switched on is researched. Difference of the thermal trace form in switching on area and switching off area is showed. Also structures like chess board are synthesized for experimental investigation. Influence of thermal processes inertness on the broadband image parameters is considered on such samples experimentally. Recommendations for experimental selection of writing power have been done.
laser material processing circular laser writing angle scales photomask production diffractive optical elements
Vladislav G. Nikitin
Technological Design Institute of Scientific Instrument Engineering (TDI SIE SB RAS) Siberian Branch of the Russian Academy of Sciences 41, Russkaya str., Novosibirsk, 630058, Russia
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-9
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）