High accuracy measurements of long-term stability of material with PTB’s Precision Interferometer
Demands on dimensional stability of “high tech materials relevant for semiconductor industry are growing considerably. Information about long term stability of materials could be extracted from high resolution length measurements performed within a relatively short time, e.g. using high finesse Fabry-Perot-resonators. However, the length changes observed during the short-term measurements can be overlapped by additional length relaxations induced by even small temperature changes before such measurement is started. This effect is reduced when long-term stability is studied from length measurements repeated in a larger period of time. This paper describes absolute length measurements with PTBs Precision Interferometer performed at four gauge block shaped material samples in order to extract reliable information about their long term stability. The long-term stability was found to be dependent not only on the material and its age itself but also on the materials history. The latter effect regards a one hour heating to 220°C applied to one of two identical sample bodies made of glass-ceramics which is still visible in the measurement results of long-term stability even after a period of almost seven years.
Interferometry Optical Metrology Length Measurement
R. Sch(o)del A. Abou-Zeid
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-9
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）