Improvement of Lateral Resolution Property of Differential Confocal System using Radial Birefringent Pupil Filter

摘要：

Lateral resolution, as one of the most important parameters of a confocal system, has a direct effect on the measurement accuracy of a confocal system. The lateral resolution of a confocal system can be improved by introducing a radial birefringent pupil filter into a differential confocal system. The pupil function of this radial birefringent pupil filter can be obtained using Jones algorithm and, the angle between the polarization direction of the polarizing film of the lateral birefringent filter and the optical axis of the birefringent element, and the size of a filter a, can be got by analyzing the first zero point G. Meanwhile, we analyzed the influence of such factors as the defocusing amount on the lateral response of the system. It was proved through simulation and experiments that the lateral resolution of a confocal system can be improved using an optimized radial birefringent pupil filter.

关键词： lateral birefringent pupil filter pupil function differential confoca lateral resolution

作者: Zou Li Min Li Xi Zhang Hong Ji Ding Xue Mei

作者单位: Institute of Ultra-precision Optoelectronic Instrument Engineering,Harbin Institute of Technology, H Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology,

会议类型: 国际会议

会议名称: 第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology

会议地点: 沈阳

会议语种:英文

页码: 1-11

在线出版日期: 2008-09-15（万方平台首次上网日期，不代表论文的发表时间）