Design of a probe for two-dimensional small angle detection

摘要：

A novel two-dimensional small angle probe is introduced, which is based on principle of auto-collimation and utilizes quadrant Si-photoelectric detector (QPD) as detection device. AC modulation, AC magnification and absolute value demodulation are incorporated to restrain the DC excursion caused by background light and noise etc and to improve the sensitivity and stability of angle detection. To ensure that while the laser is shining, the current signal (converted into voltage signal) of QPD also is linear to the AC modulation voltage, this paper adopted AC modulation signal (5400Hz) with a DC offset. AC magnification circuit with reasonable parameters is designed to inhibit DC drift and the impact of industrial frequency noise and to ensure good amplification to signal frequency at the same time. A piezoelectric-driven micro-angle generator is designed to demarcate the angle. The calibration data are input to single chip, and the measurement of angles can be shown in SMC1602A.

关键词： Auto-collimation two-dimensional small angle quadrant Si-photoelectric detector absolute value demodulation

作者: Haixia He Xuanze Wang Yuning Zhong Liangen Yang Hongduan Cao

作者单位: School of Mechanical Engineering, HuBei University of Technology, China 430068 School of Mechanical Engineering, HuBei University of Technology, China 430068 HuBei Key Lab of Manu

会议类型: 国际会议

会议名称: 第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology

会议地点: 沈阳

会议语种:英文

页码: 1-9

在线出版日期: 2008-09-15（万方平台首次上网日期，不代表论文的发表时间）