Dimensional Nanometrology at The National Physical Laboratory

摘要：

The growth in nanotechnology has led to an increased requirement for traceable dimensional measurements of nanometre-sized objects and micrometre-sized objects with nanometre tolerances. To meet this challenge NPL has developed both purpose built instrumentation and added metrology to commercially available equipment. This paper describes the development and use of a selection of these instruments that include: atomic force microscopy, x-ray interferometry, a low force balance, a micro coordinate measuring machine and an areal surface texture measuring instrument.

关键词： nanometrology nanotechnology

作者: Andrew Yacoot Richard Leach Ben Hughes Claudiu Giusca Christopher Jones Alan Wilson

作者单位: Industry and Innovation Division, National Physical Laboratory, Hampton Road, Teddington,Middlesex, Industry and Innovation Division, National Physical Laboratory, Hampton Road, Teddington,Middlesex, Industry and Innovation Division, National Physical Laboratory, Hampton Road, Teddington, Middlesex,

会议类型: 国际会议

会议名称: 第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology

会议地点: 沈阳

会议语种:英文

页码: 1-6

在线出版日期: 2008-09-15（万方平台首次上网日期，不代表论文的发表时间）