DLC Films as Anti-stiction Coatings for MEMS
The stiction of microstructures is still a challenging problem in spite of innovative advances in modern micromachining technology. In this paper, diamond-like carbon films roblem were suggested as a solution for this problem. The microwave electron cyclotron resonance plasma enhanced CVD equipment has been applied to prepare the DLC films. Confocal Raman spectra confir ere confirmed the DLC characteristics of the prepared films. Water contact angle increased from <30o on oxide-coated surfaces, to >110o on DLC-coated surfaces. The adhesion force of the DLC films was as low as 3.8nN measured by AFM, whereas the adhesion force of the oxide-coated ed surface surfaces was approximately 11.2nN. The polysilicon cantilever beam arrays have been used to determine the success of DLC coating for releasing microstructures. DLC films were prepared under the polysilicon cantilever beams with the sacrificial etching technolog s technology. The beam arra. arrays were checked wit s with scanning electron microscope. When the DLC fil films presented, the average longest detachment length was approximatel s approximately 145 m. While the DLC fil films didnt present, the average critical detachment length was shorter than 80 m. These results indicated the stiction of polysilicon cantilever beams was s effectively restrained with DLC coatings.
stiction diamond-like carbon films MEMS cantilever bea beam
Li Xin Zhang Chao Liu Jun
Shenyang University of Technology, Shenyang, China 110178
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-6
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）