Basic research on micro-nano-instruments by femtosecond laser ablation on metal surface
Nano-particles and nano-period ripples can be used to form some micro-nano-instruments in microelectronics. In this paper a femtosecond (fs) pulse laser (148fs, 1KHz, center wavelength=775nm) is used to irradiate on metal surface, then nano-particles and nano-period ripples can be obtained in the focal scale, the size of which is shorter than the center wavelength. For describing the formation time and characteristic of nano-particles and nano-period ripples, we have increased the laser fluence from the threshold of material to a higher value and increased the laser exposure time in fixed laser fluence on different materials. Experimental results show that nano-particles occur earlier than nano-period ripples. And as the fs laser pulse number being increased, the periodical nano-ripples is clearer and clearer and the depth of ripples is deeper and deeper. Finally, permanent ablation will occur in the focal scale basing on the nano-ripples. After surface plasmon polaritons theory is used, the period of nano-ripples can be explained exactly. This work is the basic research for micro-nano-instruments by fs laser ablation technique on metal surface.
Femtosecond laser nano-particles nano-ripples micro-nano-instrument surface plasmon polaritons
Xiaochang Ni Ru Hong Qi Sun Ching-yue Wang Lu Chai Wei Jia
Electronic Engineering Department, Tianjin University of Technology and Education, TianjinChina 3002 Electronic Engineering Department, Tianjin University of Technology and Education, TianjinChina 3002 Key Laboratory of Optoelectronic Information Technical Science, EMC;Ultrafast Laser Laboratory,Schoo Key Laboratory of Optoelectronic Information Technical Science, EMC;Ultrafast Laser Laboratory, Scho
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-7
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）