Ezperimental study of nanometrological AFM based on 3-D F-P interferometers
(0) Nanometrological AFM with high-resolution interferometers can be used for a wide-ranged measurements and be traceable to the unit of length, but such problems as reduction of measuring uncertainty, correction of complex nonlinearity error and advancing of repeatability restrict the application of MAFM. This paper presents the design of metrological AFM based on double F-P interferometer in XYZ directions, which consists of one He-Ne laser, one “1×3 fiber splitter and four self-focused lens instead of three sets of He-Ne laser. This design can not only avoid the traceable error caused by different optical sources in three directions, but also improve the resolution of the measurement through the transfer of nano-dimension to a pair of fundamental frequency pulse interval, while external noise and disturbance caused by outside environment are dramatically eliminated using double F-P interferometers of the same cavity length and material. Nano-dimensional measurement and stability test have been successfully accomplished with double F-P system in X or Z direction with measurement sensitivity of λ/2000nm, which meets the requirement of nanometrology.
Nanometrology AFM Double F-P Traceability Pulse time interval
Huang Yu Zhu Ruogu
China Jiliang university, 258 Xueyuan St, Hangzhou Zhejiang, 310018
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-10
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）