Compensation of motion error in a high accuracy AFM
An atomic force microscope (AFM) system is used for large-area measurement with a spiral scanning strategy, which is composed of an air slide, an air spindle and a probe unit. The motion error which is brought from the air slide and the air spindle will increase with the increasing of the measurement area. Then the measurement accuracy will decrease. In order to achieve a high speed and high accuracy measurement, the probe scans along X-direction with constant height mode driven by the air slide, and at the same time, based on the change way of the motion error, it moves along Zdirection conducted by piezoactuator. According to the above method of error compensation, the profile measurement experiment of a micro-structured surface has been carried out. The experimental result shows that this method is effective for eliminating motion error, and it can achieve high speed and precision measurement of micro-structured surface.
AFM high speed high accuracy motion error error compensation
Yuguo Cui Yoshikazu Arai Gaofa He Takemi Asai Wei Gao
Nano-metrology and Control Laboratory, Dept. of Nanomechanics, Tohoku Univ., 6-6-01, AramakiAza Aoba Nano-metrology and Control Laboratory, Dept. of Nanomechanics, Tohoku Univ., 6-6-01, Aramaki Aza Aob
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-6
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）