A Diffraction Grating Scale for Long Range and Nanometer Resolution
This paper presents a novel design of a laser linear encoder based on the principle of diffractive interferometry. It adopts a special design in optical path that can increase the alignment tolerance between the optical head and the grating. Because of the simple optical configuration and the merit of compact size, it can effectively reduce the environmental disturbance and allow higher stability. In addition, the signal process circuit can effectively decrease three major errors: the DC shift difference, the electronic gain difference and the phase orthogonal error of two sinusoid al output signals. The resolution can reach to 1nm. Experiment results showed the standard deviation was below 17nm for 15mm travel in normal laboratory environment.
Linear encoder diffraction gratings interferometer nanometer resolution
Kuang-Chao Fan Bai-Kun Li Chi-Hui Liu
Dept. of Mechanical Engineering, National Taiwan Univ., 1, Sec.4, Roosevelt Rd.,Taipei 106, Taiwan Dept. of Mechanical Engineering, National Taiwan Univ., 1, Sec.4, Roosevelt Rd., Taipei 106, Taiwan
国际会议
第五届仪器科学与技术国际学术会议(ISIST 2008)Fifth International Symposium on Instrmentation Science and Technology
沈阳
英文
1-8
2008-09-15（万方平台首次上网日期，不代表论文的发表时间）