Characterization of PZT Thin Films by Sol-gel Method in Application of Resonant Sensor

摘要：

Micrometer-scale piezoelectric PZT sensors for gravimetric applications were developed. The PZT thin films were fabricated with sol-gel PZT and were of 400×
400 um2 working area. Optical microscopy, scanning electron microscopy, leakage current density analysis, and C-V characterization were employed to evaluate the structure as well as successfulness of the microfabrication process. A resonance measurement circuit, which transformed the resonance frequency signal to a DC level, was built to characterize the gravimetric ability of the PZT sensors. Change of mass on the PZT sensor can be detected by observing the DC shift at the output of the detection circuit.

关键词： PZT resonant gravimetric piezoelectric

作者: J. Z. Tsai C. J. Chen C. W. Hsiao D.T Hsieh Y. M. Hsin

作者单位: Department of Electrical Engineering, National Central University No. 300, Jhongda Rd, Jhongli City, Taoyuan County 32001, Taiwan

会议类型: 国际会议

会议名称: The 2nd International Conference on Bioinformatics and Biomedical Engineering(iCBBE 2008)(第二届生物信息与生物医学工程国际会议)

会议地点: 上海

会议语种:英文

页码: 196-198

在线出版日期: 2008-05-16（万方平台首次上网日期，不代表论文的发表时间）