Design of a Biochemistry Sensor based on FAIMS Theory and Optimization Design Considering Brim-effect of Electrical Field
A biochemistry sensor based on FAIMS (field asymmetric mobility spectrometry) theory has been fabricated and characterized. The rectangular drift tube of FAIMS is 20×10×2mm3 and is equipped with a plane-to-plane dielectric barrier discharge as the ionization source. The rectangular drift tube and ionization source were fabricated by MEMS technology with deposited metal films on glass substrates. At ambient pressure, the sensor was characterized by acetone and ethanol mixtures with nitrogen (99.99％) as carrier gas. The ability to separate ions was demonstrated by experiment. By the ANSYS software, the effects of parameters of drift tube, such as length, thickness, distance between rectangular drift tubes et al on brim-effect of electrical field were analyzed, which brings the theoretical foundation for the optimization design of the biochemistry sensor.
biochemistry sensor FAIMS drift tube MEMS brimeffect
Li Hua Tang Fei Wang Xiaohao Wang zhigang
Department of Precision Instruments and Mechanology Tsinghua University, Beijing, 100084, China
国际会议
上海
英文
955-958
2008-05-16（万方平台首次上网日期，不代表论文的发表时间）