PROCESSING OF POLYMER AND ORGANIC MATERIALS BY TUNABLE, ULTRAFAST MID-INFRARED LASERS

摘要：

Recent market developments in electronic and optoelectronic devices based on small organic molecules and polymers is driving the search for a variety of new processing tools for thin-film deposition. In this paper, we describe a new vacuum-phase thin-film deposition technique — resonant infrared pulsed laser deposition — that is a true vapor phase deposition technique for thermally labile or photochemically sensitive organics and polymers. Several examples of thin-film deposition, including structural, insulating and conducting polymers, are presented. Specifications for a commercial thin-film deposition based on this technique are also discussed.

作者: Richard F. Haglund, Jr Nicole L. Dygert Stephen L. Johnson Kenneth E. Schriver Hee K. Park

作者单位: Department of Physics and Astronomy and W. M. Keck Foundation Free-Electron Laser Center, Vanderbilt Department of Physics and Astronomy and W. M. Keck Foundation Free-Electron Laser Center, Vanderbilt AppliFlex LLC, 320 Logue Avenue, Suite 104, Mountain View, CA 94043 U.S.A.

会议类型: 国际会议

会议名称: 第三届太平洋国际激光与光学应用会议(PICALO 2008)

会议地点: 北京

会议语种:英文

页码: 658-663

在线出版日期: 2008-04-16（万方平台首次上网日期，不代表论文的发表时间）