PRACTICAL ISSUES IN LASER MICRO/NANO MACHINING

摘要：

Laser has become an important tool for micro/nano machining. To enable the successful application of laser micro/nano machining in manufacturing, requirements on geometry, speed and quality have to be fulfilled. In this paper, we review several representative applications of laser micro/nano machining, and discuss ways of solving the practical issues simultaneously.

作者: Wenwu Zhang Jeffrey Shaw Brian Farrell

作者单位: Laser and Metrology Systems Lab., Materials Systems Technologies, GE Global Research, Schenectady, N Thin Films Lab., Micro and Nano Structures Technologies, GE Global research, Schenectady, NY, 12309,

会议类型: 国际会议

会议名称: 第三届太平洋国际激光与光学应用会议(PICALO 2008)

会议地点: 北京

会议语种:英文

页码: 795-800

在线出版日期: 2008-04-16（万方平台首次上网日期，不代表论文的发表时间）