FABRICATION OF MICRO-MACHINE ELEMENTS BY FIVE-AXIS LASER PROCESSING SYSTEM
Laser micro-processing system, which consisted of five-axis PC-controlled automatic stage and FHG of Nd:YAG/ Yb doped fiber laser oscillators, was developed. By arrangement of the stages, this system enabled both of milling and lathe processing for various materials. In this study, for example, a microwindmill (outer diameter: 400 μm) of polyimide and a micro-cylindrical cantilever (diameter: 125 μm) of ionexchanged lime-sodium glass were fabricated. The dimension errors of these elements were within five percent of designed diameters. A micro-spring (diameter: 460 μm) of stainless steel was also fabricated by laser lathe method coupled with electrochemical polishing technique.
Souta MATSUSAKA Kensuke IIJIMA Youhei MIZOGUCHI Takehiro WATANABE
Department of Mechanical Engineering, Chiba University 1-33, Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
国际会议
第三届太平洋国际激光与光学应用会议(PICALO 2008)
北京
英文
846-851
2008-04-16（万方平台首次上网日期，不代表论文的发表时间）