High Tunable Capacitor Using a Finger Structured Electrode

摘要：

We present a novel tunable metal-insulator-metal (MIM) capacitor with the finger-structure electrode for improving its tunability. The capacitors were fabricated on a low-resistivity Si substrate employing lead zinc niobate (PZN) thin film dielectric. The fabricated capacitor, whose line width and spacing was 2.5 and 2.0μm, respectively, achieved the effective capacitance tunability of 22.9％ at 5.5 V. This achieved tunability is higher value of 10％ than that of the conventional rectangular MIM capacitor at 900 MHz.

作者: Young Chul Lee Kyung Hyun Ko

作者单位: Div.of Marine Electronics and Communication Engineering Mokpo National Maritime University (MMU),Kor Department of Materials Science and Engineering,Ajou University,Korea

会议类型: 国际会议

会议名称: Progress in Electromagnetics Research Symposium 2008(2008年电磁学研究新进展学术研讨会)(PIERS 2008)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2008-03-24（万方平台首次上网日期，不代表论文的发表时间）