Design and Simulation of Modified 1-D Electrostatic Torsional Micromirrors with z-azis Displacement
Micromirrors based on Micromechanical systems (MEMS) have been essential components in many applications, such as micro confocal microscopy, optical data storage and biomedical imaging 1-3. A variety of microfabrication and actuation technologies have been used to realize micromirrors, including electrothermal 3, electrostatic 1, etc., of which electrostatic torsional drive has been thought to be the most popular driving mechanism. K. E. Peterson 4 has developed the world first 1-D electrostatic driven torsional micromirror. The Lucent 5 Lambdroutor is one of famous and successful examples of 2-D electrostatic torsional micromirrors. For design improvement of this type of 2-D micromirror, Toshiyoshi et al. 6 have proposed a linearization method based on applying a small control voltage over a large bias voltage. Chiou et al. 7 have presented improved design to demonstrate linear stepping angles of 1-D micromirrors based on multiple electrodes. These developments are focus on realizing linear steps in angle. As mentioned by above articles, there are also displacements in z-axis as the micromirror is actuated, which have been ignored. The z-axis displacements have become a significant problem when the micromirrors are used on high resolution spatial scanning. Krishnamoorthy et al. 8 presents a dual-mode 1-D micromirror utilizing stacked multilayer vertical comb drive actuators, which can provide both piston and tilt motion. We have developed a z-axis displacement compensation concept for 2-D electrostatic torsional micromirrors previously 9.
Lijie Li Deepak Uttamchandani Mark Begbie
The Institute for System Level Integration,Alba Campus Livingston,Scotland EH54 7EG,UK
国际会议
Progress in Electromagnetics Research Symposium 2008(2008年电磁学研究新进展学术研讨会)(PIERS 2008)
杭州
英文
1-3
2008-03-24（万方平台首次上网日期，不代表论文的发表时间）