3D Microstructuring of Glass by Femtosecond Laser Direct Writing and Application to Biophotonic Microchips
Three-dimensional (3D) microfabrication of photostructurable glass by femtosecond (fs) laser direct writing is demonstrated for manufacture of biophotonic microchips. The fs laser direct writing followed by annealing and successive wet etching can fabricate the hollow microstructures, achieving a vareiety of microffiuidic components and microoptical components in a glass chip. One of the interesting and important applications of the 3D microffiuidic structures fabricated by the present technique is inspection of living microorganisms. The microchips used for this application are referred to as nanoaquarium. Furthermore, the optical waveguide is written inside the glass by the fs laser direct writing without the annealing and the successive etching. It is revealed that integration of the microffiuidic and microoptical components with the optical waveguides in a single glass chip is of great use for biochemical analysis and medical inspection based on optical sensing.
Koji Sugioka Yasutaka Hanada Katsumi Midorikawa
The Institute of Physical and Chemical Research,RIKEN Wako,Saitama 351-0198,Japan
国际会议
Progress in Electromagnetics Research Symposium 2008(2008年电磁学研究新进展学术研讨会)(PIERS 2008)
杭州
英文
1-5
2008-03-24（万方平台首次上网日期，不代表论文的发表时间）