Fabrication and Analysis of Valve-less Micro Pumps
Due to dramatic progress in microfluidic devices and their applications, the development of microfluidic systems become more and more pertinent in recent years, such as fluidic activation devices, micro-sensors and micro-pumps. In this research, micro-electro-mechanical fabrication technologies are employed to fabricate an innovative valve-less micro-pump under magnetic control. The micro-coil is fabricated by electroforming and utilized to generate control force. Prior to fabrication of micro-pump, commercial software CFD-RC and ANSOFT are used first to simulate the performance of the designed micro-pump. CFD-RC is to observe the flow field and pressure in the micro-channel, and ANSOFT to evaluate if the magnetic force is sufficient enough to activate the membrane of the micro-pump. Finally, the micro-pump is equipped with a personal computer, in which dSPACE simulation module DS1104 is embedded, to realize the closed-loop micro-system.
Nan-Chyuan Tsai Wei-Ming Huang Chao-Wen Chiang Rong-Mao Lee
Department of Mechanical Engineering,National Cheng Kung University No.1,University Road,Tainan 70101,Taiwan
国际会议
Progress in Electromagnetics Research Symposium 2008(2008年电磁学研究新进展学术研讨会)(PIERS 2008)
杭州
英文
1-5
2008-03-24（万方平台首次上网日期，不代表论文的发表时间）