Hybrid Numerical Simulation of Electrostatic Force Microscopes Considering Charge Distribution

摘要：

The electrostatic force microscope (EFM) is an important tool for imaging and characterizing material surfaces. In this paper a hybrid numerical approach for the simulation of the EFM considering charge distribution inside the sample under investigtion is presented. In the simulation model effectrical part is considered. In this paper first a basic knowledge on the EFM and then the numerical model of the EFM considering volume charge distribution are presented. At last several numerical simulation results of the EFM in 3D are pesented.

作者: U. B. Bala M. Greiff W. Mathis

作者单位: Institute of Electromagnetic Theory Leibniz University of Hannover, Germany

会议类型: 国际会议

会议名称: Progress in Electromagnetics Research Symposium 2007(2007年电磁学研究新进展学术研讨会)(PIERS 2007)

会议地点: 北京

会议语种:英文

页码: 1515-1519

在线出版日期: 2007-03-26（万方平台首次上网日期，不代表论文的发表时间）