Properties of Ti-Co-La-N Films Deposited by Asymmetric Bipolar Pulsed Reactive Magnetron Sputtering
Ti-Co-La-N nano-composite films with different Co-La doping amount were deposited by the asymmetric bipolar pulsed reactive magnetron sputtering. The microstructure, morphology, adhesion, microhardness and tribological properties of the films were investigated by means of scanning electron microscopy (SEM), X-ray diffraction (XRD), nano-indentation, scratching test, friction and wear testing. The results show that phase compositions of Ti-Co-La-N films are TiN, Co2N and LaN. The microhardness of 14.61GPa of Ti-Co-La-N film is lower than that of TiN. Furthermore, microhardness and adhesion of the composite film declined apparently as the increasing of Co/La doping amount. The friction coefficient of Ti-Co-La-N film is about 0.6 on the high-speed steel substrates. This film will have considerable potential for functional application.
Nano-composite Co-La doping TiN
LI Cheng-ming CHEN Liang-xian LIU Zheng HEI Li-fu LU Fan-xiu
School of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,P.R.China
国际会议
The Fourth Asian Conference on Heat Treatment and Surface Engineering(第四届亚洲热处理及表面工程大会)
北京
英文
463-465
2009-10-27（万方平台首次上网日期，不代表论文的发表时间）