Microstructure, Mechanical and Tribological Properties of Ti/C Multilayer Films Deposited by DC Magnetron Sputtering
Ti/C multilayer films with bilayer periods of 25 - 85 nm were deposited on quench-and-temper high speed steel (W18Cr4V) substrate by means of DC closed field unbalanced magnetron sputtering. The morphology and microstructure of the Ti/C multilayer films were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD) and transmission electron microscopy (TEM). Nanoindentation, scratch and ball-on-disk wear tests were carried out to evaluate the hardness, adhesive strength and tribological properties. In the bilayer period range, the hardness, elastic modulus and adhesive strength of the Ti/C multilayer films increased with the decrease of bilayer period. Wear test showed the friction coefficient ranged from 0.09 to 0.23 and the wear rate is from 1.9×10-17 to 4.5×10-17m3-N-1m-1 in humid air (RH = 50％).
Multilayer Bilayer period Tribological property Magnetron sputtering
LI Rui-ling HONG Chun-fu LIU Dong-guang TU Jiang-ping
Department of Materials Science and Engineering,State Key Laboratory of Silicon Materials,Zhejiang University,Hangzhou 310027,China
国际会议
The Fourth Asian Conference on Heat Treatment and Surface Engineering(第四届亚洲热处理及表面工程大会)
北京
英文
466-470
2009-10-27（万方平台首次上网日期，不代表论文的发表时间）