Effect of Sputtering Process Conditions on Microstructure and Mechanical Properties of Fe-Pt Nano Film

摘要：

One of the vertical magnetic recordings medium materials of the hard disk drive(HDD) is a Fe/Pt thin film. The development of ultra-high density magnetic recording medium in next generation is expected the magnetic disks such as HDD with capacity enlargement of the data. In order to study effectiveness of the proposed sputtering method, we evaluated micro structure, magnetic and the mechanical properties of a Fe/Pt thin film by some sputtering process conditions. From research results, effect sputtering conditions on micro-structure and mechanical properties of Fe/Pt nano film are verified.

关键词： sputtering recording media Fe/Pt thin film

作者: R.Ogatsu S.Ishiguro T.Nakano D.Y.Ju Kousuke Ishigawa

作者单位: Department of Materials Science and Engineering,Graduate School of Science and Engineering,Saitama I Department of Materials Science and Engineering,Saitama Institute of Technology,Fukaya,Japan

会议类型: 国际会议

会议名称: The Fourth Asian Conference on Heat Treatment and Surface Engineering(第四届亚洲热处理及表面工程大会)

会议地点: 北京

会议语种:英文

页码: 471-475

在线出版日期: 2009-10-27（万方平台首次上网日期，不代表论文的发表时间）