Hydrogenated Carbon Films Containing Fullerene-like Structures: Formation, Structure and Properties

摘要：

Hydrogenated carbon films containing fullerene-like structures (FL-C:H) were synthesized using magnetron sputtering of a titanium target in methane and argon atmosphere. The results indicate clearly that a substantial part of the film is made up of fragments of such fiillerene-like structures mixed in a hydrogenated amorphous carbon matrix. The film grown at -800 V bias exhibits excellent mechanical properties with a hardness of 20.9 Gpa and an elastic recovery as high as 85％. We attribute it to the unique structure of the film, in which fullerene-like structure just like a molecule spring disperses in film, reserves the elastic energy during distortion through reversible bond rotation and bond angle deflection, while amorphous carbon matrix restrains the relaxation of rigid C-C network and compressive stress, and restricts the slip of graphene sheets.

关键词： Magnetron sputtering carbon films structures mechanical properties

作者: WANG Peng XIA Wang JUAN Pang-xian LIU Wei-min

作者单位: State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of S State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of S

会议类型: 国际会议

会议名称: The Fourth Asian Conference on Heat Treatment and Surface Engineering(第四届亚洲热处理及表面工程大会)

会议地点: 北京

会议语种:英文

页码: 491-493

在线出版日期: 2009-10-27（万方平台首次上网日期，不代表论文的发表时间）