Deposition of MoS2/SiC Films by Radio Frequency Magnetron Sputtering

摘要：

The surface morphology, the components and the mechanical properties of MoS2/SiC double layer thin films deposited on GCr15 steel substrate using radio frequency magnetron sputtering technique were investigated by scanning electron microscopy, energy spectrometer, friction and wear tester and scratch tester respectively. The results show that the surface morphology of the MoS2/SiC films prepared on GCr15 steel substrate was vermicular. The inner layer of SiC and the outer layer of MoS2 were binded tightly with a flat interface and the thickness of the films was about 0.8 urn. The films- substrate system exhibited a excellent friction and wear properties with the mean friction coefficient of about 0.11. Interlayers added into the films could improve the cohesion between the substrate and the MoS2/SiC films from 21N to 26N.

关键词： MoS2/SiC films magnetron sputtering deposition surface morphology friction and wear cohesion

作者: WANG Xiao-jing SHAO Hong-hong WANG Ji

作者单位: School of Material Science and Engineering,Jiangsu University,Zhenjiang Jiangsu,212013,China

会议类型: 国际会议

会议名称: The Fourth Asian Conference on Heat Treatment and Surface Engineering(第四届亚洲热处理及表面工程大会)

会议地点: 北京

会议语种:英文

页码: 506-509

在线出版日期: 2009-10-27（万方平台首次上网日期，不代表论文的发表时间）