Sponge like nanostructured silicon for integrated light emitters

摘要：

A new approach to nanoporous silicon formation is proposed. Anomalies both in low current densities and low fluorine ion concentrations, which is lead to low uniformity of formed porous silicon, are under consideration. It is shown that at very low current densities and fluorine ion concentration high uniformity, high porosity nanoporous silicon layers can be created. Structural, electrical and optical properties of porous silicon formed in wide range of current densities, silicon substrates doping levels and fluorine concentrations are presented.

关键词： porous silicon nanostructure electroluminescence

作者: A.Hubarevich P.Jaguiro Y.Mukha A.Smirnov Wang Yonggang Yu Hong Yu

作者单位: Laboratory of Information Displays, Belarusian State University of Informatics and Radioelectronics, Division of Microelectronics, Nanyang Technological University, Singapore

会议类型: 国际会议

会议名称: The 11th Asian Symposium on Information Display(ASID09)(第11届亚洲信息显示会议)

会议地点: 广州

会议语种:英文

页码: 230-232

在线出版日期: 2009-10-07（万方平台首次上网日期，不代表论文的发表时间）