Secondary Discharge Phenomenon of Coplanar Electrodes Microplasma Devices
The secondary discharge phenomenon of Coplanar Electrodes Microplasma Devices (CEMPD) has been investigated. To investigate the details of the secondary discharge, the two-dimensional discharge characteristics of CEMPD are simulated based on particle-in-cell/Monte Carlo modal. For all simulations, the width and the height of microcavity are 100μm and the gap between two electrodes is 20μm. When the voltage is kept on 200V, the discharge expands from one connection between microcavity and gap to the other connection at about 50ns, which is defined secondary discharge. The experimental and simulation results show that with the range of the pressure from 65kPa to 100kPa the secondary discharge happens.
coplanar electrode microplasma devices secondary discharge particle-in-cell simulation
Lingguo Meng Jianping Xing Hui Wang Zhihu Liang Chunliang Liu
School of Physics, Shandong University, Jinan, China, 250100 School of Information Science and Engineering, Shandong University, Jinan, China, 250100 Key Laboratory of Physical Electronics and Devices of the Ministry of Education, Xian Jiaotong Univ
国际会议
The 11th Asian Symposium on Information Display(ASID09)(第11届亚洲信息显示会议)
广州
英文
237-240
2009-10-07（万方平台首次上网日期，不代表论文的发表时间）