FABRICATION OF PLANAR MICRO-ELECTRODE ARRAYS AS A CELL-BASED BIOSENSOR
Micro-electrode Arrays (MEA) has emerged as a leading technology for extracellular electrophysiological investigations of neuronal networks. This paper introduces the fabrication of planar MEA on the quartz and its application in electrophysiological studies on living cells. The MEA have 8×8 planar microelectrodes, which are covered with a non-toxic, biocompatitable passivation layer, and are further photo-etched by the standard process to expose the microelectrodes and the terminals. The impedance of electrodes is reduced by electroplating with platinum black. It is proved via PC12 cell culturing that the MEA is biocompatible for coupling the extracellular signal as a cell based biosensor, and the system is fit for action potential recording.
Micro-electrode arrays microfabication cellular electrophysiology
Chen Haifeng Li Cheng Guo Kai Gui Qiang Chen Hongda
Huadong Research Institute for Medicine and Biotechnics, Nanjing 210002, China State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors,Chinese Academy of c State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors,Chinese Academy of S
国际会议
The 6th International Forum on Post-genome Technologies(6IFPT)(第六届国际后基因组生命科学技术学术论坛)
北京
英文
125-128
2009-09-17(万方平台首次上网日期,不代表论文的发表时间)