High-accuracy Survey and Calculation Method Based on Statistical Theory for Superfine Scale Size
Discussing a new ideal for using diffraction theory to measure superfine scale size, such as small slot or very thin wire etc, this paper presents an experiment, by means of searching the least of standard difference between the data on diffraction luminance distribution measured with unknown slot and the data calculated on diffraction theory with given slot what is simulated by computer from big to small with tiny step. The result shows that the size of given slot is very close to the size of unknown slot measured, at the condition of the least of standard difference. It is different from the slot measurement by the location of dark strip on diffraction luminance distribution with indirect inaccurate. The conclusion is that the higher-accuracy survey under the condition of calculation method based on statistical theory is to improve measurement on superfine scale size by diffraction luminance distribution.
Measurement diffraction Luminance distribution Statistical theory
Li Fen Jin Wei
Center of Laboratory, Northeastern University at Qinhuangdao, China No.143,Taishan Road, Diveloping District, Qinhuangdao, 066004 China
国际会议
沈阳
英文
501-503
2009-08-27（万方平台首次上网日期，不代表论文的发表时间）