Blue Photoluminescence from Cerium Ions Doped Aluminum Ozide Films by Medium Frequency Reactive Magnetron Sputtering
Aluminum oxide film doped with Ce3+ have been deposited by the medium frequency reactive mag- netron sputtering technique. The photoluminescence emission from these films show peaks at range of 374-405 nm. The relative intensity of these peaks is strongly dependent on the amount of Ce incorporated in the films, and the temperature during deposition. The presence of Ce3+ as well as the stoichiometry of these films have been determi- ned by energy dispersive x-ray spectroscope (EDS) measurements. It is proposed that the light emission observed generated by luminescent center associated with cerium chloride molecular rather than to atomic cerium impurities. The reason for a dominance of the lower energy transition as the amount of Ce3+ in the oxide films is increased is that the energy difference of 4f1 and 5d1 decreases, with the increase of the Ce3+ concentration. The crystalline structure of the sample was analysed by x-ray diffractometry (XRD). Auger electron spectroscopy has been used to estimate the stoichiometry of the films. These luminescent films are potentially good candidates for photonics applications.
Aluminum ozide Thin films Blue photoluminescence Sputtering Rare earth
LIAO Guo-jin LUO Hong YAN Shao-feng CHEN Ming DAI Xiao-chun
Faculty of Mechanical Engineering and Automation, Liaoning University of Technology, jinzhou 121001, PetroChina Northeast Refining & Chemicals Engineering Company Limited JinZhou Design Institute, jinz
国际会议
沈阳
英文
221-226
2009-08-24（万方平台首次上网日期，不代表论文的发表时间）