Cd1-zZnzTe alloy films grown by r.f.sputtering
Cd1-xZnxTe alloy films with 1.6 and 1.7 eV band gaps were deposited on glass as the absorbed layer in solar cells by RF magnetron sputtering from Cd0.9Zn0.1Te crystals target grown by the Modified Vertical Bridgman method. High-quality polycrystalline films were obtained. The influences of the deposition temperature on polycrystalline Cd1-xZnxTe films have been studied using X-ray diffraction (XRD), energy dispersive X-ray (EDX), step profilometer, atomic force microscopy (AFM) and ultraviolet spectrophotometer. We found that the degree of crystallinity and the grain size of the deposited films changed regularly with the increase of deposition temperatures. The optical absorption coefficient a decreased monotonically with the increase of deposition temperature.
Cd1-zZnzTe film RF sputtering deposition temperature
ZENG Dong-mei ZHOU Hai SUN Jin-chi ANG Ying-ge FENG Wen-ran WAN Han-cheng LU Yi-min
Department of Materials Science and Engineering, Beijing Institute of Petrochemical Technology, Beij Beijing Microelectronic Technology Institute, Beijing 100076, China
国际会议
沈阳
英文
253-258
2009-08-24（万方平台首次上网日期，不代表论文的发表时间）