Design of sputtering vacuum machine based on the Atemga 128
Introduce double-target sputtering vacuum machine, itused in the manufacturing of quartz crystal, MCU as the core to Atemgal28 with the host computer for data transmission, is designed to obtain a vacuum, ionization cleansing, magnetron sputtering process controLThe sputtering vacuum machine to achieve a variety of metal electrode manufacture requirements, and the realization of quartz resonator manufacturing process requirements.
Magnetron sputtering Vacuum ATmega128
LIU Yan-tao MA Jian-ping
Xian University of Technology Institute of Automation, 710048
国际会议
沈阳
英文
282-286
2009-08-24（万方平台首次上网日期，不代表论文的发表时间）